Post-Implantation Annealing Effects on the Surface Morphology and Electrical Characteristics of 6H-SiC Implanted with Aluminum

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

831-834

DOI:

10.4028/www.scientific.net/MSF.389-393.831

Citation:

A. Ohi et al., "Post-Implantation Annealing Effects on the Surface Morphology and Electrical Characteristics of 6H-SiC Implanted with Aluminum", Materials Science Forum, Vols. 389-393, pp. 831-834, 2002

Online since:

April 2002

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$35.00

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