Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

819-822

Citation:

K. A. Jones et al., "Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap", Materials Science Forum, Vols. 389-393, pp. 819-822, 2002

Online since:

April 2002

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$38.00

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