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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Comparison of Al and Al/C Co-Implants in 4H-SiC...

Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

819-822

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.819

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Online since:

April 2002

Authors:

Kenneth A. Jones, Pankaj B. Shah, Michael A. Derenge, Matthew H. Ervin, G.J. Gerardi, Jaime A. Freitas, G.C.B. Braga, R.D. Vispute, R.P. Sharma, O.W. Holland

Keywords:

AlN Cap, Aluminum (Al), Annealing, Carbon, CL, EPR, Implantation, RBS

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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