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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Comparison between Chemical and Electrical...

Comparison between Chemical and Electrical Profiles in Al⁺ or N⁺ Implanted and Annealed 6H-SiC

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

811-814

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.811

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Online since:

April 2002

Authors:

Roberta Nipoti, A. Carnera, Vito Raineri

Keywords:

Ion Implantation, Scanning Capacitance Microscopy, SIMS

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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