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Influence of Rapid Thermal Annealing on Ni/6H-SiC Contact Formation

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Silicon Carbide and Related Materials 2001 View Preview

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

901-904

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.901

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Online since:

April 2002

Authors:

Oleg A. Agueev, Alexander M. Svetlichnyi, Roman N. Razgonov

Keywords:

Ni/6H-SiC Contacts, Rapid Thermal Annealing (RTA)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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