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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Effects of Surface Treatments of 6H-SiC upon...

Effects of Surface Treatments of 6H-SiC upon Metal-SiC Interfaces

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

909-912

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.909

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Online since:

April 2002

Authors:

Koji Abe, M. Sumitomo, T. Sumi, Osamu Eryu, Kenshiro Nakashima

Keywords:

AES, Aluminum (Al), CAICISS, Contamination, Ohmic Contact, Surface Treatment, X-Ray Photoelectron Spectroscopy (XPS)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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