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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Effect of Rapid Thermal Annealing Conditions on...

Effect of Rapid Thermal Annealing Conditions on Parameters of Ni/21R-SiC Contacts

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

905-908

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.905

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Online since:

April 2002

Authors:

V.L. Litvinov, K.D. Demakov, Oleg A. Agueev, Alexander M. Svetlichnyi, Raisa V. Konakova, Petr M. Lytvyn, Victor V. Milenin

Keywords:

Ni/21R-SiC Contacts, Rapid Thermal Annealing (RTA), Structural Studies

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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