Surface Structure of Electrochemically Etched α-SiC Substrates

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

717-720

Citation:

H. Mikami et al., "Surface Structure of Electrochemically Etched α-SiC Substrates", Materials Science Forum, Vols. 433-436, pp. 717-720, 2003

Online since:

September 2003

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[5] W. Choyke, H. Matsunami and G. Pensl : Sillicon Carbide, John wiley & Sons, New York, (1997). Fig. 7. (a) The AFM image [23µmغ] in etched 4H-SiC and (b) cross sectional profile of A-A.