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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Investigation of Mass Transport during SiC PVT...

Investigation of Mass Transport during SiC PVT Growth Using Digital X-Ray Imaging, ¹³C Labeling of Source Material and Numerical Modeling

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

9-12

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.9

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Online since:

September 2003

Authors:

Peter J. Wellmann, Z.G. Herro, M. Selder, F. Durst, Roland Püsche, Martin Hundhausen, Lothar Ley, Albrecht Winnacker

Keywords:

Physical Vapor Transport Growth, Raman Spectroscopy, Si¹³C, Source Material, X-Ray Imaging

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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