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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Towards a Continuous Feeding of the PVT Growth...

Towards a Continuous Feeding of the PVT Growth Process: an Experimental Investigation

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

25-28

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.25

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Online since:

September 2003

Authors:

Didier Chaussende, Francis Baillet, Ludovic Charpentier, Etienne Pernot, Michel Pons, Roland Madar

Keywords:

Bulk Growth, HTCVD, PVT

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[1] D. Hobgood, M. Brady, W. Brixius, G. Fechko, R. Glass, D. Henshall, J. Jenny, R. Leonard, D. Malta, St.G. Muller, V. Tsvetkov, C.H. Carter Jr., Mater. Sci. Forum 338-342 (2000) p.3.

DOI: 10.4028/www.scientific.net/msf.338-342.3

[2] B. Epelbaum, D. Hofmann, M. Muller, A. Winnacker, Mater. Sci. Forum 338-342 (2000) p.107.

[3] A. Ellison, thesis, Linköping university, (1999).

[4] F. Baillet et al., proceeding of the ECSCRM2002.

[5] L. Charpentier et al., proceeding of the ECSCRM2002.