SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

937-940

Citation:

U. Zimmermann et al., "SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers", Materials Science Forum, Vols. 433-436, pp. 937-940, 2003

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September 2003

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[1] A. Galeckas, J. Linnros, and B. Breitholtz: Mater. Sci. Forum V. 338-342 (2000), pp.683-6.

[2] J. Bergman, H. Lendenmann, P. Nilsson, U. Lindefelt, and P. Skytt: Mater. Sci. Forum V. 353-356 (2001), pp.299-302.

DOI: https://doi.org/10.4028/www.scientific.net/msf.353-356.299

[3] P. Persson, L. Hultman, H. Jacobson, J. Molina-Aldareguia, J. Bergman, T. Tuomi, W. Clegg, and E. Janz´en: Mater. Sci. Forum V. 389-393 (2002), pp.423-6.

DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.423

[4] H. Iwata, U. Lindefelt, S. ¨Oberg, and P. Briddon: Mater. Sci. Forum V. 389-393 (2002), pp.439-42.

[5] R. Okojie, M. Xhang, P. Pirouz, S. Tumakha, G. Jessen, and L. Brillson: Mater. Sci. Forum V. 389-393 (2002), pp.451-4.

DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.451

[6] H. Iwata, U. Lindefelt, S. ¨Oberg, and P. Briddon: Phys. Rev. B V. 65 (2002), p.033203.

[7] U. Zimmermann, J. ¨Ostermann, J. Zhang, A. Henry, and A. Hall´en: Mater. Sci. Forum V. 389-393 (2002), pp.1285-8.

[8] M. Capano, S. Ryu, J. Cooper, J.A., M. Melloch, K. Rottner, S. Karlsson, N. Nordell, A. Powell, and J. Walker, D.E.: J. Electron. Mater. V. 28 (1999), p.214.

[9] Zeiss AG: DSM 962 Digital Scanning Microscope User Manual (1992).

[10] K. Kanaya and S. Okayama: J. Phys. D: Appl. Phys. V. 5 (Jan. 1972), pp.43-58.

[11] S. Ha, W. Vetter, M. Dudley, and M. Skowronski: Mater. Sci. Forum V. 389-393 (2002), pp.443-6.

[12] H. Lendenmann, F. Dahlquist, J. Bergman, H. Bleichner, and C. Hallin: Mater. Sci. Forum V. 389-393 (2002), pp.1259-4.

DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.1259

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