SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

937-940

DOI:

10.4028/www.scientific.net/MSF.433-436.937

Citation:

U. Zimmermann et al., "SEM Visibility of Stacking Faults in 4H-Silicon Carbide Epitaxial and Implanted Layers", Materials Science Forum, Vols. 433-436, pp. 937-940, 2003

Online since:

September 2003

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$35.00

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