Effect of Crucible Design on the Shape and the Quality in 6H-SiC Crystals Grown by Physical Vapor Transport

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

103-106

Citation:

M. Y. Um et al., "Effect of Crucible Design on the Shape and the Quality in 6H-SiC Crystals Grown by Physical Vapor Transport", Materials Science Forum, Vols. 457-460, pp. 103-106, 2004

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June 2004

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DOI: https://doi.org/10.1016/s0022-0248(99)00754-x

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