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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Effect of Thermal Field on Interface Step...

Effect of Thermal Field on Interface Step Structures during PVT Growth of (0001)Si 6H-SiC

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Silicon Carbide and Related Materials 2003

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

95-98

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.95

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Online since:

June 2004

Authors:

Z.G. Herro, Boris M. Epelbaum, Matthias Bickermann, Pierre M. Masri, Albrecht Winnacker

Keywords:

Atomic Force Microscope (AFM), Nanosteps, SiC Surface, Step Structure, Thermal Field

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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