Vapour-Liquid-Solid Induced Localised Growth of Heavily Al Doped 4H-SiC on Patterned Substrate

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

241-244

DOI:

10.4028/www.scientific.net/MSF.457-460.241

Citation:

C. Jacquier et al., "Vapour-Liquid-Solid Induced Localised Growth of Heavily Al Doped 4H-SiC on Patterned Substrate ", Materials Science Forum, Vols. 457-460, pp. 241-244, 2004

Online since:

June 2004

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