Paper Title:
Growth and Characterization of the 4H-SiC Epilayers on Substrates with Different Off-Cut Directions
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
229-232
DOI
10.4028/www.scientific.net/MSF.457-460.229
Citation
H. Tsuchida, I. Kamata, S. Izumi, T. Tawara, K. Izumi, "Growth and Characterization of the 4H-SiC Epilayers on Substrates with Different Off-Cut Directions ", Materials Science Forum, Vols. 457-460, pp. 229-232, 2004
Online since
June 2004
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