Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

217-220

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C. Sartel et al., "Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems", Materials Science Forum, Vols. 457-460, pp. 217-220, 2004

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June 2004

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[1] H. Matsunami And T. Kimoto: Mat. Sci. and Eng. R, Vol. 20 (1997), p.125.

[2] J.K. Jeong, H.J. Na, J. Choi, B.S. Kim, M.Y. Um and H.J. Kim: Thin solid Films, Vols. 377-378 (2000), p.567.

[3] C. Sartel, V. Soulière, J. Dazord, Y. Monteil, I. El-Harrouni, J.M. Bluet and G. Guillot: Mat. Sci. Forum, vols. 389-393 (2001), p.263.

DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.263

[4] P. Aboughé-Nzé: Thesis Université Lyon 1, (2001).

[5] A.N. Vorob'ev, Y.E. Egorov, Y.N. Makarov, A.I. Zhmakin, A.O. Galyukov and R. Rupp: Mat. Sci. Eng. B, Vols. 61-62 (1999), p.172.

[6] S. Nakashima and H. Harima; Phys. Stat. Solid. (a), 1997, Vol. 162, p.39.

[7] I.G. Ivanov, C. Hallin, A. Henry, O. Kordina and E. Janzén; J. Appl. Phys., Vol. 80(6) (1996), p.3504.

[8] A. Henry, A. Ellison, U. Forsberg, B. Magnusson, G. Pozina. and E. Janzén: Mat. Sci. Forum, Vols. 389-393 (2002), p.593. Figure 5: LTPL spectra collected on two layers grown with a) SP and b) HP precursor systems.

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