Improvement of SiC Wafer Warp by Annealing

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

829-832

Citation:

M. Sasaki et al., "Improvement of SiC Wafer Warp by Annealing", Materials Science Forum, Vols. 457-460, pp. 829-832, 2004

Online since:

June 2004

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