Mechanisms in Electrochemical Etching of α-SiC Substrates


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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet




H. Mikami et al., "Mechanisms in Electrochemical Etching of α-SiC Substrates", Materials Science Forum, Vols. 457-460, pp. 813-816, 2004

Online since:

June 2004




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DOI: 10.4028/

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