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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Comparison of Different Surface Pre-Treatments to...

Comparison of Different Surface Pre-Treatments to n-Type 4H-SiC and their Effect on the Specific Contact Resistance of Ni Ohmic Contacts

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Silicon Carbide and Related Materials 2003

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

833-836

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.833

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Online since:

June 2004

Authors:

G. Pope, Owen James Guy, Philip Andrew Mawby

Keywords:

Ohmic Contact, Silicon Carbide (SiC), Specific Contact Resistance, Surface Preparation

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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