Low Sheet Resistance of High-Dose Aluminium Implanted 4H-SiC using (11-20) Face

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

913-916

Citation:

Y. Negoro et al., "Low Sheet Resistance of High-Dose Aluminium Implanted 4H-SiC using (11-20) Face", Materials Science Forum, Vols. 457-460, pp. 913-916, 2004

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June 2004

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