4H-SiC Lateral RESURF MOSFETs on Carbon-Face Substrates

Abstract:

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We have fabricated lateral RESURF MOSFETs on 4H-SiC(0001) Si-face and (000-1) C-face substrates, and compared those properties. The channel mobility of a lateral test MOSFET on a C-face was 41 cm2/Vs, which was much higher than 5 cm2/Vs for that on a Si-face. The specific on-resistance of the lateral RESURF MOSFET on a C-face was improved to 79 mΩcm2 as comparison with 2400 mΩcm2 for Si-face. The breakdown voltage was 490V for Si-face and 460V for C-face, which was 82% and 79% of the designed breakdown voltage of 600V, respectively. The device breakdown occurred destructively at the gate electrode edge.

Info:

Periodical:

Materials Science Forum (Volumes 483-485)

Edited by:

Roberta Nipoti, Antonella Poggi and Andrea Scorzoni

Pages:

805-808

DOI:

10.4028/www.scientific.net/MSF.483-485.805

Citation:

M. Okamoto et al., "4H-SiC Lateral RESURF MOSFETs on Carbon-Face Substrates", Materials Science Forum, Vols. 483-485, pp. 805-808, 2005

Online since:

May 2005

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Price:

$35.00

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