Almost Ideal Thermionic-Emission Properties of Ti-Based 4H-SiC Schottky Barrier Diodes

Abstract:

Article Preview

We have carefully investigated a number of more than 120 selected chips fabricated on one wafer, by I-V measurements at two different precisely controlled temperatures and precision CV measurements at room temperature. From these measurements the net-doping concentration, the C-V (flat-band) barrier ΦCV, the ideality n, the apparent Richardson constant Aapp and the apparent I-V barrier Φapp have been extracted for each chip. An extremely unique C-V barrier was determined showing a relative standard deviation (sigma over mean) of only 0.086%. Moreover, the average ideality n was found to be as low as 1.028 exhibiting a relative standard deviation of only 0.35%. A clear linear correlation (ρ2 = 0.968) between ideality n and apparent I-V barrier was observed. The effective Richardson constant A** of 4H-SiC in 〈0001〉 directions could therefore be extracted to be most likely in the interval 70 Acm-2K-2 < A** < 80 Acm-2K-2.

Info:

Periodical:

Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow

Pages:

1147-1150

DOI:

10.4028/www.scientific.net/MSF.527-529.1147

Citation:

D. Stephani et al., "Almost Ideal Thermionic-Emission Properties of Ti-Based 4H-SiC Schottky Barrier Diodes", Materials Science Forum, Vols. 527-529, pp. 1147-1150, 2006

Online since:

October 2006

Export:

Price:

$35.00

[1] R.T. Tung: Electron transport at metal-semiconductor interfaces: General theory, Phys. Rev. B 45(23), (1992), p.13509.

DOI: 10.1103/physrevb.45.13509

[2] E.H. Rhoderick and R.H. Williams: Metal-Semiconductor Contacts, Second Edition (1988) Monographs in Electrical and Electronic Engineering No. 19 Oxford Science Publications.

[3] D. Volm et al.: Determination of the electron effective-mass tensor in 4H SiC, Phys. Rev. B 53 (1996), p.15409.

[8] 99 12 5 4.

[60] 80 120 Effective Richardson constant A* ( Acm-2K-2) Frequency.

[1] 100 40200.

100.

[20] [40] [60] [80] [8] 99 12 5 4.

[60] 80 120 Effective Richardson constant A* ( Acm-2K-2) Frequency.

[1] 100 40200.

100.

[20] [40] [60] 80.

In order to see related information, you need to Login.