Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps

K.W. Kirchner; Kenneth A. Jones; Michael A. Derenge; Michael Dudley; Adrian R. Powell

doi:10.4028/www.scientific.net/MSF.556-557.213

Paper Titles

Initial Growth in 3C-SiC Sublimation Epitaxy on 6H-SiC
p.195

Mechanism of Orientation Selection for the Growth Of (111) Twin Boundary Free 3C-SiC Single Crystals on Hexagonal Basis
p.199

Morphology and Stress Control in UHVCVD of 3C-SiC(100) on Si
p.203

Trends in Dopant Incorporation for 3C-SiC Films on Silicon
p.207

Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps
p.213

6H-SiC Crystals Grown in [015] and [001] Directions Characterized by High Energy Triple-Axis X-Ray Diffraction
p.219

Absence of Dislocation Motion in 3C-SiC pn Diodes under Forward Bias
p.223

An X-Ray Topographic Analysis of the Crystal Quality of Globally Available SiC Wafers
p.227

Behavior of Basal Plane Dislocations and Low Angle Grain Boundary Formation in Hexagonal Silicon Carbide
p.231

HomeMaterials Science ForumMaterials Science Forum Vols. 556-557Mosaicity and Wafer Bending in SiC Wafers as...

Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps

Abstract:

Double and triple crystal rocking curve and peak position maps are constructed for a 4HSiC wafer for the symmetric (0 0 0 8) reflection in the normal position, the same reflection for a sample rotated 90º, and an asymmetric (1 23 6) reflection for the wafer in the normal position. These measurements were corrected for the ‘wobble’ in the instrument by scanning a 4” (1 1 1) Si wafer and assuming that the Si wafer was perfect and attributing the variations in the measurements to instrumental error. The x-ray measurements are correlated with a cross polar image, etch pit density map, white beam transmission x-ray topograph, and a laser light scan.

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Materials Science Forum (Volumes 556-557)

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213-218

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.556-557.213

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Online since:

September 2007

Authors:

K.W. Kirchner, Kenneth A. Jones, Michael A. Derenge, Michael Dudley, Adrian R. Powell

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High Resolution X-Ray Diffraction (HR-XRD), Peak Position Maps, Rocking Curve Maps

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References

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