Elastic Properties of Dense Organosilicate Glasses Dependent on the C/Si Ratio

Jan M. Knaup; Han Li; Joost J. Vlassak; Efthimios Kaxiras

doi:10.4028/www.scientific.net/MSF.645-648.267

Paper Titles

Polytypism Study in SiC Epilayers Using Electron Backscatter Diffraction
p.251

Raman Characterization of Doped 3C-SiC/Si for Different Silicon Substrates and C/Si Ratios
p.255

Low Temperature near Band Gap Photoluminescence of 3C-SiC/15R-SiC and 3C-SiC/6H-SiC Heterostructures
p.259

Determination of the Optical Bandgap of Thin Amorphous (SiC)_1-x(AlN)_x Films
p.263

Elastic Properties of Dense Organosilicate Glasses Dependent on the C/Si Ratio
p.267

A Pictorial Tracking of Basal Plane Dislocations in SiC Epitaxy
p.271

On the Luminescence and Driving Force of Stacking Faults in 4H-SiC
p.277

Systematic First Principles Calculations of the Effects of Stacking Fault Defects on the 4H-SiC Band Structure
p.283

In-Grown Stacking Faults Identified in 4H-SiC Epilayers Grown at High Growth Rate
p.287

HomeMaterials Science ForumMaterials Science Forum Vols. 645-648Elastic Properties of Dense Organosilicate Glasses...

Elastic Properties of Dense Organosilicate Glasses Dependent on the C/Si Ratio

Abstract:

Organosilicate glasses (OSG) are of great technological interest as low-k dielectrics. We use ab initio simulations to analyze the influence of the C/Si ratio in OSG on the density and elastic properties of pore-free material to gain a detailed understanding of the origins of these properties in this class of materials. We find that the addition of carbon to amorphous silica leads to a stiffening of the material by removing the bending degrees of freedom of Si-O-Si bonds. This transition in mechanisms of stiffness, leads to a distinctly nonlinear behavior of the bulk and elastic modulus over the C/Si ratio. Experimental results do not contradict our findings, however dominant pore effects impede conclusive comparison.

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Materials Science Forum (Volumes 645-648)

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267-270

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https://doi.org/10.4028/www.scientific.net/MSF.645-648.267

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April 2010

Authors:

Jan M. Knaup, Han Li, Joost J. Vlassak, Efthimios Kaxiras

Keywords:

Bulk Modulus, Elastic Modulus

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