Experimental Verification of the Cluster Effect on Giant Step Bunching on 4H-SiC (0001) Surfaces

Yuuki Ishida; Tetsuo Takahashi; Hajime Okumura; Kazuo Arai; Sadafumi Yoshida

doi:10.4028/www.scientific.net/MSF.645-648.543

Paper Titles

EDMR and EPR Studies of 4H SiC MOSFETs and Capacitors
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Electrical Properties and Gas Sensing Characteristics of the Al₂O₃/4H SiC Interface Studied by Impedance Spectroscopy
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Crystalline Quality of Channel Regions in SiC Buried Gate Static Induction Transistors (SiC-BGSITs)
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Study of the Evolution of Basal Plane Dislocations during Epitaxial Growth: Role of the Surface Kinetics
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Experimental Verification of the Cluster Effect on Giant Step Bunching on 4H-SiC (0001) Surfaces
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Modal Composition of the SiC Surface Electromagnetic Response to the External Radiation at Lattice Resonant Frequency
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Study of Indentation Damage in Single Crystal Silicon Carbide by Using Micro Raman Spectroscopy
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Single Shockley Faults Enlargement during Micro-Photoluminescence Defects Mapping
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Characterization of Defects in Semi-Insulating 6H-SiC Substrates Using IR Thermal Imaging Camera
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HomeMaterials Science ForumMaterials Science Forum Vols. 645-648Experimental Verification of the Cluster Effect on...

Experimental Verification of the Cluster Effect on Giant Step Bunching on 4H-SiC (0001) Surfaces

Abstract:

In this study, we investigated the cluster effect on the occurrence of giant step bunching. We generated carbon clusters on 4H-SiC (0001) surfaces by thermal decomposition of SiC in an Ar atmosphere and controlled the surface concentrations of the clusters by adding H2 gas. We found the boundaries between surfaces with and without giant steps to show Arrhenius-type behavior. This behavior agreed with our predictions deduced from a chemical reaction model that takes the cluster effect into account, suggesting that giant step bunching is attributable to the formation of clusters on SiC.

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Silicon Carbide and Related Materials 2009

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Materials Science Forum (Volumes 645-648)

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543-546

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https://doi.org/10.4028/www.scientific.net/MSF.645-648.543

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April 2010

Authors:

Yuuki Ishida, Tetsuo Takahashi, Hajime Okumura, Kazuo Arai, Sadafumi Yoshida

Keywords:

Etching, Giant Step Bunching

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