The Limits of Post Oxidation Annealing in NO

Abstract:

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We report on the benefits and the shortcomings of the NO annealing process following observations made on capacitors and transistors with various nitrogen densities at the SiO2/SiC interface. While NO annealing leads to a progressively lower interface state density and higher inversion mobility, consistent with Coulomb-limited transport, MOSFET properties are still limited by the relatively poor interface quality. Moreover, NO induces a large amount of hole traps in the oxide. We establish that these properties are not related to the oxidation rate and we discuss them in terms of the nitrogen content.

Info:

Periodical:

Materials Science Forum (Volumes 645-648)

Edited by:

Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller

Pages:

693-696

DOI:

10.4028/www.scientific.net/MSF.645-648.693

Citation:

J. Rozen et al., "The Limits of Post Oxidation Annealing in NO", Materials Science Forum, Vols. 645-648, pp. 693-696, 2010

Online since:

April 2010

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Price:

$35.00

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