The Effect of Phenol Resin Types and Mixing Ratios on the Synthesis of High-Purity β-SiC Powder by the Sol-Gel Method

Yun Ki Byeun; Rainer Telle; Kyong Sop Han; Sang Whan Park

doi:10.4028/www.scientific.net/MSF.645-648.71

Paper Titles

Study of the Spontaneous Nucleation of 3C-SiC Single Crystals Using CF-PVT Technique
p.55

Heavily p-Type Doping of Bulk 6H-SiC and 3C-SiC Grown from Al-Si Melts
p.59

Improvements of the Continuous Feed-Physical Vapor Transport Technique (CF-PVT) for the Seeded Growth of 3C-SiC Crystals
p.63

Is the Liquid Phase a Viable Approach for Bulk Growth of 3C-SiC?
p.67

The Effect of Phenol Resin Types and Mixing Ratios on the Synthesis of High-Purity β-SiC Powder by the Sol-Gel Method
p.71

Low-Pressure Fast Growth and Characterization of 4H-SiC Epilayers
p.77

Growth and Properties of SiC On-Axis Homoepitaxial Layers
p.83

High-Performance Multi-Wafer SiC Epitaxy – First Results of Using a 10x100mm Reactor
p.89

Concentrated Chloride-Based Epitaxial Growth of 4H-SiC
p.95

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The Effect of Phenol Resin Types and Mixing Ratios on the Synthesis of High-Purity β-SiC Powder by the Sol-Gel Method

Abstract:

In this study, we carried out a sol-gel processing to synthesize two types of phenol resin and TEOS sol with fluoric acid as the catalysts, and fabricated the β-SiC powder by carbothermal reduction of the obtained precursor gels. The gels were observed to be cross linked between TEOS and phenol resins by FT-IR and TG-DTA. After pyrolyzed at 1000oC in Ar to obtain the precursor, to confirm the phase transition and morphologies by XRD, and SEM were measured. Finally, the light green colored SiC powder was obtained after carbothermal reduction process up to 1800oC. The residual condensed SiO(v) phase and free carbons as a role of impurities for final products using the solid type phenol resin was observed in the surface of powder by BSE.