Is the Liquid Phase a Viable Approach for Bulk Growth of 3C-SiC?

Abstract:

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Despite outstanding properties, the development of 3C-SiC electronics is still suffering from the lack of bulk 3C-SiC substrates. Up to now, there is no real seed and optimized growth processes for this material. We address in this work the bulk growth of 3C-SiC by a two-step-liquid phase approach. By coupling experiments with global process simulation, we address the problems that must be overcome to consider the solution growth technique as a possible approach for the growth of bulk 3C-SiC.

Info:

Periodical:

Materials Science Forum (Volumes 645-648)

Edited by:

Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller

Pages:

67-70

DOI:

10.4028/www.scientific.net/MSF.645-648.67

Citation:

F. Mercier et al., "Is the Liquid Phase a Viable Approach for Bulk Growth of 3C-SiC?", Materials Science Forum, Vols. 645-648, pp. 67-70, 2010

Online since:

April 2010

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Price:

$35.00

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