Is the Liquid Phase a Viable Approach for Bulk Growth of 3C-SiC?
Despite outstanding properties, the development of 3C-SiC electronics is still suffering from the lack of bulk 3C-SiC substrates. Up to now, there is no real seed and optimized growth processes for this material. We address in this work the bulk growth of 3C-SiC by a two-step-liquid phase approach. By coupling experiments with global process simulation, we address the problems that must be overcome to consider the solution growth technique as a possible approach for the growth of bulk 3C-SiC.
Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller
F. Mercier et al., "Is the Liquid Phase a Viable Approach for Bulk Growth of 3C-SiC?", Materials Science Forum, Vols. 645-648, pp. 67-70, 2010