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Impact of RTA on the Morphology of Oxygen Precipitates and on the Getter Efficiency for Cu and Ni in Si Wafers

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Abstract:

The influence of RTA pre-treatments on the morphology of oxygen precipitates in silicon wafers as deduced from haze getter tests was confirmed by FTIR and TEM investigations. Based on the results of the getter tests, the ratio between the density of plate-like and octahedral precipitates was calculated for RTA pre-treated silicon samples.

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Periodical:

Materials Science Forum (Volume 725)

Pages:

239-242

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.725.239

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Online since:

July 2012

Authors:

Dawid Kot, Gudrun Kissinger, Markus Andreas Schubert, Timo Müller, Andreas Sattler

Keywords:

FT-IR, Morphology of Oxygen Precipitates, TEM

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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