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Characterization of Spin Coated Nondoped and In-Doped ZnO Films Using Novel Precursor Solution

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Abstract:

A novel precursor for ZnO film deposition with Zn-O structure was synthesized by the reaction of diethylzinc and water in some ether solvents. The novel precursor was characterized by 1H-NMR spectroscopy and differential scanning calorimetry (DSC). Nondoped and In-doped ZnO films on a glass substrate have been successfully grown by conventional spin coating using nondoped and In added novel precursor solution. The samples have an optical transmittance of more than 85%, and a smooth surface determined from optical transmittance and scanning electron microscopy, respectively. The sheet resistivity of In-doped ZnO films is lower than that of nondoped ZnO film.

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Periodical:

Materials Science Forum (Volume 725)

Pages:

277-280

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.725.277

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Online since:

July 2012

Authors:

Koichiro Inaba, Yujin Takemoto, Kouji Toyota, Kenichi Haga, Kouichi Tokudome, Masato Shinmiya, Naomi Kamiya, Minoru Oshima, Kenji Yoshino

Keywords:

Diethylzinc, Hydrolysis Reaction, In-Doped ZnO, Nonvacuum, Precursor, Spin Coating

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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