High Temperature SiC Sensor with an Isolated Package

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Abstract:

This paper presents an improved version and new results on a temperature sensor based on SiC Schottky Barrier Diode (SBD). SiC SBD structures of different areas were packaged in a metallic-glass case. The encapsulated sensor was electrically measured at several temperatures. A good linearity of the forward voltage measured at a constant current versus temperature dependence was obtained in the temperature range of 150-400°C where the sensor is meant to operate. Optical investigation, correlated with electrical measurements, prove the reliability of the sensor structure and of the package solutions at temperatures up to 400°C.

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Materials Science Forum (Volumes 740-742)

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1002-1005

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January 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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