Structural Analysis of ZnO Thin Films Grown in Room Temperature on PET Film

Hiroshi Yamamoto; Kohei Idehara; Ryota Kimura; Hiroshi Nishigaki; Noriyuki Hasuike; Hiroshi Harima; Toshiyuki Isshiki

doi:10.4028/www.scientific.net/MSF.778-780.1201

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Ion-Beam Irradiation Effect in the Growth Process of Graphene on Silicon Carbide-on-Insulator Substrates
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Commercialization of High 600V GaN-on-Silicon Power Devices
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Magnetoresistance of AlGaN/GaN High Electron Mobility Transistors on Silicon
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Evidence of Low Temperature Decomposition of GaN Hetero-Epitaxial Layers on C-Plane Sapphire Surface Characterized by Differential Scanning Calorimetry
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A Proposal to Apply Effective Acceptor Level for Representing Increased Ionization Ratio of Mg Acceptors in Extrinsically Photon-Recycled GaN
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Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching
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Evaluation of Degradation due to Electron Irradiation of Si_1-xC_x S/D n-type MOSFETs
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Structural Analysis of ZnO Thin Films Grown in Room Temperature on PET Film
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Structural Analysis of ZnO Thin Films Grown in Room Temperature on PET Film

Abstract:

The structure of ZnO thin films grown in room temperature by reactive DC sputter technique on polyethylene terephthalate film were evaluated by SEM and TEM. The quality of ZnO thin films grown in room temperature were observed to vary widely. ZnO crystals grow without uniform orientation in early stage of growth, and then ZnO crystallinity improves as the ZnO thin films grow up. And ZnO crystallinity is influenced by roughened surface of PET film.