Electromagnetic Enhancement of Carbon Transport in SiC Solution Growth Process: A Numerical Modeling Approach

Kanaparin Ariyawong; Jean Marc Dedulle; Didier Chaussende

doi:10.4028/www.scientific.net/MSF.778-780.71

Paper Titles

Fast 4H-SiC Crystal Growth by High-Temperature Gas Source Method
p.55

Dislocation Analysis of 4H-SiC Crystals Obtained at Fast Growth Rate by the High-Temperature Gas Source Method
p.59

Increase in the Growth Rate by Rotating the Seed Crystal at High Speed during the Solution Growth of SiC
p.63

Surface Morphology and Threading Dislocation Conversion Behavior during Solution Growth of 4H-SiC Using Al-Si Solvent
p.67

Electromagnetic Enhancement of Carbon Transport in SiC Solution Growth Process: A Numerical Modeling Approach
p.71

Solution Growth of p-Type 4H-SiC Bulk Crystals with Low Resistivity
p.75

Top-Seeded Solution Growth of 3 Inch Diameter 4H-SiC Bulk Crystal Using Metal Solvents
p.79

Evolution of Fast 4H-SiC CVD Growth and Defect Reduction Techniques
p.85

Demonstration of High Quality 4H-SiC Epitaxial Growth with Extremely Low Basal Plane Dislocation Density
p.91

HomeMaterials Science ForumMaterials Science Forum Vols. 778-780Electromagnetic Enhancement of Carbon Transport in...

Electromagnetic Enhancement of Carbon Transport in SiC Solution Growth Process: A Numerical Modeling Approach

Abstract:

The carbon distribution and its transport in the liquid from the source to the crystal directly affect the control of parasitic nucleation, the growth front stability, and the growth rate during SiC solution growth. Controlling the carbon transport is one of the key issues for understanding and improving the process. In this paper, numerical modeling by finite element method is used to describe the complex convective flow pattern in the melt. We focus on electromagnetic convection and investigate the effect of coil frequency, keeping a simple and technologically realistic crucible design. We show that below a critical value of frequency, the carbon transport can be controlled by the electromagnetic convection, giving rise to significant growth rate enhancement.