Designing of Quasi-Modulated Region in 4H-SiC Lateral RESURF MOSFETs

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Abstract:

Characteristics of high-voltage lateral silicon carbide metal-oxide-semiconductor field-effect transistors (MOSFETs) with various reduced surface field (RESURF) structures were simulated. Breakdown voltage was enhanced from 5300 V for single-zone RESURF to 7400 V for two-zone, and to 7600 V for quasi-modulated RESURF MOSFETs.

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Materials Science Forum (Volumes 778-780)

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943-946

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February 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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