High Temperature Grown Graphene on SiC Studied by Raman and FTIR Spectroscopy

Manuel Auge; Bernd Hähnlein; Marco Eckstein; Georg Woltersdorf; Jörg Pezoldt

doi:10.4028/www.scientific.net/MSF.897.727

Paper Titles

Thermal and Lattice Misfit Stress Relaxation in Growing AlN Crystal with Simultaneous Evaporation of SiC Substrate
p.711

Thermo-Mechanical Reliability and Performance Degradation of a Lead-Free RF Power Amplifier with Gan-on-SiC Hemts
p.715

Prediction of High-Density and High-Mobility Two-Dimensional Electron Gas at Al_xGa_1-xN/4H-SiC Interface
p.719

Investigation of Direct Water Photoelectrolysis Process Using III-N Structures
p.723

High Temperature Grown Graphene on SiC Studied by Raman and FTIR Spectroscopy
p.727

CVD Growth of Graphene on SiC (0001): Influence of Substrate Offcut
p.731

Nanostructuring of Graphene on Semi-Insulating SiC
p.735

Realization and Characterization of Carbonic Layers on 4H-SiC for Electrochemical Detections
p.739

High Temperature Reliability Assessment and Degradation Analysis for Diamond Semiconductor Devices
p.743

HomeMaterials Science ForumMaterials Science Forum Vol. 897High Temperature Grown Graphene on SiC Studied by...

High Temperature Grown Graphene on SiC Studied by Raman and FTIR Spectroscopy

Abstract:

Epitaxial graphene on semiinsulating silicon carbide was grown using a high temperature method at atmospheric pressure in argon atmosphere. The temperature dependence of the layer quality was analysed using Raman and infrared spectroscopy. It is demonstrated that infrared spectroscopy can be used as a versatile tool to access the layer count and the quality of the epitaxial grown graphene on silicon carbide. The results obtained by infrared spectroscopy correlate with the Raman measurements.

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Materials Science Forum (Volume 897)

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727-730

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https://doi.org/10.4028/www.scientific.net/MSF.897.727

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Online since:

May 2017

Authors:

Manuel Auge, Bernd Hähnlein, Marco Eckstein, Georg Woltersdorf, Jörg Pezoldt*

Keywords:

Epitaxial Graphene, Infrared Spectroscopy, Raman Spectroscopy

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