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HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104Metrology and Removal of Nanoparticles from 500...

Metrology and Removal of Nanoparticles from 500 Micron Deep Trenches

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Abstract:

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Ultra Clean Processing of Silicon Surfaces VII

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

137-140

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.137

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Online since:

April 2005

Authors:

O. Guldiken, K. Bakhtari, Ahmed A. Busnaina, J. Park

Keywords:

Fluorescent Particles Metrology, Nanoparticle, Surface Cleaning, Trenches

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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