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HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104Strength Distribution of Megasonic Damage Events

Strength Distribution of Megasonic Damage Events

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Abstract:

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Ultra Clean Processing of Silicon Surfaces VII

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

147-150

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.147

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Online since:

April 2005

Authors:

Kurt K. Christenson

Keywords:

Aspect Ratio, Cavitation, Damage, Line Width, Megasonic, Poly-Silicon, Strength Distribution

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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[1] Plesset and Chapman, J. Fluid Mech., 47, 283, 1971. Also, LA Crum "Bubble Phenomena in Sound Fields: Part 2," Ultrasonics 1984; 2:115-124.

[2] Shigley and Mischke, "Mechanical Engineering Design," fifth edition, McGraw-Hill, New York, 1989, p.41.

[3] K. Christenson, "Development of Non-Damaging Megasonic Cleaning Processes," Fourth Ann. FSI Surface Conditioning Symp., J. Butterbaugh Ed., 2004.