Electrophoretic Studies on Silicon Nitride: Traces of Silicates in UPW Shift Zeta Potential Similar to SC-1

Alexander Pfeuffer; Wolfgang Bensch; Alfred Lechner; Harald Okorn-Schmidt

doi:10.4028/www.scientific.net/SSP.103-104.163

Paper Titles

Strength Distribution of Megasonic Damage Events
p.147

Using Megasonics for Particle and Residue Removal in Single Wafer Cleaning
p.151

Behaviour of a Well-Designed Megasonic Cleaning System
p.155

Megasonics: A Cavitation Driven Process
p.159

Electrophoretic Studies on Silicon Nitride: Traces of Silicates in UPW Shift Zeta Potential Similar to SC-1
p.163

Damage-Free Cleaning of Sub-50 nm Devices Using Directed Megasonics Technology in a Single Wafer Processor
p.167

A Comparison of Particle Filtration in a Recirculated Wet Bench Wet Cleaning Tool: Performance of PTFE Filters and of Surface Optimized Filters
p.171

Influences of Oxide Loss on Contamination Removal
p.177

Non-Damaging Particle Removal Using Cryogenic Aerosols
p.181

HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104Electrophoretic Studies on Silicon Nitride: Traces...

Electrophoretic Studies on Silicon Nitride: Traces of Silicates in UPW Shift Zeta Potential Similar to SC-1

Abstract:

In this paper we report on a new method of controlling the zeta potential of Si3N4 particles by addition of silicate traces to neutral ultra pure water (UPW). The positive zeta potential of Si3N4 at neutral pH shifts to negative values similar in alkaline pH solutions (e.g. with ammonia).

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

163-166

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.163

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Online since:

April 2005

Authors:

Alexander Pfeuffer, Wolfgang Bensch, Alfred Lechner, Harald Okorn-Schmidt

Keywords:

Silicate, Zeta-Potential

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