A Comparison of Particle Filtration in a Recirculated Wet Bench Wet Cleaning Tool: Performance of PTFE Filters and of Surface Optimized Filters

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

171-176

DOI:

10.4028/www.scientific.net/SSP.103-104.171

Citation:

G. Haas et al., "A Comparison of Particle Filtration in a Recirculated Wet Bench Wet Cleaning Tool: Performance of PTFE Filters and of Surface Optimized Filters", Solid State Phenomena, Vols. 103-104, pp. 171-176, 2005

Online since:

April 2005

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$35.00

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