A Comparison of Particle Filtration in a Recirculated Wet Bench Wet Cleaning Tool: Performance of PTFE Filters and of Surface Optimized Filters

Abstract:

• Periodical: Solid State Phenomena (Volumes 103-104)
• Pages: 171-176
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.103-104.171
• Online since: April 2005
• Authors: Günter Haas, Bipin Parekh, Jeremie Frankhauser, Benoît Viallet, Patrick Palka, Jérôme Bras
• Keywords: DHF, Filtration, Microcontamination, SC1, SC2, Wet Cleaning

References

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DOI: 10.1002/ppsc.19910080126

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DOI: 10.17764/jiet.2.36.1.3013036291k8n475

[3] W. P. Kelly and D. C. Grant, Optimization of filter properties for recirculating etch baths, Journal of the IEST 44 (2000) 30-40.

DOI: 10.17764/jiet.43.3.72574h1883p177u4

[4] W. P. Kelly, D. C. Grant, J. Zahka, W. Huang and S. Raghavan, Effect of surface charge and fluid properties on particle removal characteristics of a surface-optimized REB filter, Diffusion and Defect Data - Solid State Data, Part B: Solid State Phenomena 76-77 (2000) 271-274.

DOI: 10.4028/www.scientific.net/ssp.76-77.271

[5] Communication with Dr. Chase Duclose-Orsello.

[6] B. Parekh, J. Frankhauser, G. Haas, B. Viallet, J. Bras, P. Palka 3, "Particle Control for Advanced Wet Process", European Semiconductor, May 2004 NOTE: Intercept, QuickChange and Mykrolis are registered trademarks of Mykrolis Corp. Teflon is a registered trademark of E.I. DuPont deNemours and Company. GAMA is a trademark of Akrion LLC. End-of-drain signal of wet bench and start of production Batch entering bath Particles per ml (0.065-0.1 µm) Batch leaving bath Average particle level: < 5/ml Figure 1: Particle counts in DHF with 0.1 µm rated PTFE filter End-of-drain signal of wet bench and start of production Batch entering bath Batch leaving bath Particles per ml (0.065-0.1 µm) Average particle level: < 5/ml Figure 2: Particle counts in DHF with Intercept filter Median of defectivity on lot Number of Defects /cm 2 Before After Figure 3: Pattern defect counts on production lots

DOI: 10.7554/elife.25174.007