Damage-Free Cleaning of Sub-50 nm Devices Using Directed Megasonics Technology in a Single Wafer Processor

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

167-170

DOI:

10.4028/www.scientific.net/SSP.103-104.167

Citation:

J.J. Rosato et al., "Damage-Free Cleaning of Sub-50 nm Devices Using Directed Megasonics Technology in a Single Wafer Processor", Solid State Phenomena, Vols. 103-104, pp. 167-170, 2005

Online since:

April 2005

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Price:

$35.00

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