Challenges of Finer Particle Detection on Bulk-Silicon and SOI Wafers

Abstract:

• Periodical: Solid State Phenomena (Volumes 103-104)
• Pages: 121-128
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.103-104.121
• Online since: April 2005
• Authors: Takeshi Hattori, Akira Okamoto, Hitoshi Kuniyasu
• Keywords: COP, ITRS, Laser, LPD, Particle, Roughness, SC1, Scattering, Scratch, SCROD, SOI

References

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DOI: 10.1063/1.1354411

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