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HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104Cleaning Capability of High Concentration Ozonated...

Cleaning Capability of High Concentration Ozonated Water

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

305-308

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.305

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Online since:

April 2005

Authors:

Teruo Haibara, Kenichi Uemura, Takio Adachi

Keywords:

Ozonated Water, Resist Removal, Self-Decomposition

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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[1] Shimoi, Adachi, Asano, Clean Technology 13, (3), 33 (2003). US Patent No. US 6,423,235 B1. (See: http://www.nce-ltd.co.jp/)

[2] S. Nakayama, K. Esaki, K. Namba, Y. Taniguchi, and N. Tabata, Ozone Sci. & Eng. 1, 119 (1979). Figure 7. Effect of ozonated water temperature with the same ozone concentration. Figure 8. Effect of ozonated water temperature and ozone concentrations under the same output conditions of the Bamboo Generator. 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 16M-UPW + CO2 Resist removal rate ( µm/min) 23.5°C 123mg/L 19.5°C 123mg/L 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 64M-UPW 16M-UPW 64M-UPW + CO2 16M-UPW + CO2 Resist removal rate(µm/min) 24.8°C 113mg/L 23.5°C 123mg/L 20.5°C 131mg/L 19.5°C 143mg/L 24.8°C 45mg/L 20.0°C 48mg/L 23.5°C 78mg/L 19.0°C 88mg/L

DOI: 10.1080/01919512.2019.1680527