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HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104Copper Decontamination Ability of...

Copper Decontamination Ability of Supercritical-CO₂/Additives on CVD and Spin-On Porous MSQ Materials

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

327-330

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.327

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Online since:

April 2005

Authors:

Jerome Daviot, V. Perrut, F. Gaillard, C. Millet, Adrien Danel, Lucile Broussous, Didier Louis

Keywords:

Low-k Decontamination, PER Cleaning, Supercritical CO₂

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Сopyright:

© 2005 Trans Tech Publications Ltd. All Rights Reserved

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