Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

327-330

DOI:

10.4028/www.scientific.net/SSP.103-104.327

Citation:

J. Daviot et al., "Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials", Solid State Phenomena, Vols. 103-104, pp. 327-330, 2005

Online since:

April 2005

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$35.00

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