Activated He:H2 Strip of Photoresist over Porous Low-k Materials

Abstract:

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

341-344

DOI:

10.4028/www.scientific.net/SSP.103-104.341

Citation:

Q. Y. Han et al., "Activated He:H2 Strip of Photoresist over Porous Low-k Materials", Solid State Phenomena, Vols. 103-104, pp. 341-344, 2005

Online since:

April 2005

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Price:

$35.00

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