Supercritical CO2 Applications in BEOL Cleaning

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

315-322

DOI:

10.4028/www.scientific.net/SSP.103-104.315

Citation:

P.D. Matz and R.F. Reidy, "Supercritical CO2 Applications in BEOL Cleaning", Solid State Phenomena, Vols. 103-104, pp. 315-322, 2005

Online since:

April 2005

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$35.00

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