Effective Polymer Removal: Process Window-Process Uniformity-Extended Chemical Bath-Life

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Periodical:

Solid State Phenomena (Volumes 103-104)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

385-0

DOI:

10.4028/www.scientific.net/SSP.103-104.385

Citation:

C. Yew-Leong et al., "Effective Polymer Removal: Process Window-Process Uniformity-Extended Chemical Bath-Life", Solid State Phenomena, Vols. 103-104, pp. 385-0, 2005

Online since:

April 2005

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Price:

$35.00

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