Effective Polymer Removal: Process Window-Process Uniformity-Extended Chemical Bath-Life

Abstract:

• Periodical: Solid State Phenomena (Volumes 103-104)
• Pages: 385-0
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.103-104.385
• Online since: April 2005
• Authors: Chuan Yew-Leong, Wee Boon-Lim, Wayne A-Cady, Nik A-Mustapha, Kah Keen-Lai
• Keywords: ALEG^TM-310 Stripper, Define-Measure-Analysis-Implement-Control DMAIC, Water Spiking

References

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05 Figure 7: ET data comparison Summary In summary, we are able to control and sustain cleaning effectiveness as well as the process uniformity of ALEG-310 stripper such that bath-life and process window are optimized. Zero occurrence of polymer residue was observed on metal lines throughout the ALEG-310 stripper bath-life and no impact on electrical performance and yield of devices was found with spiking. Concurrently, we have also succeeded in developing and setting up a system that can spike water into the ALEG-310 stripper chemical bath and monitor the bath. This breakthrough has brought down our cost indexes - ALEG-310 stripper usage (litres) per wafer fab-out improved by 33% while the chemical usage cost per wafer fab-out improved by 25%. ALEG is a trademark of Mallinckrodt Baker, Inc. W afers w ith P olym er R esidue

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60%Jan'03 Feb'03 Mar'03 Apr'03 May'03 Jun'03 Jul'03 Aug'03 No Spike W ith S pike W ith a n d W ith o u t S p ik in g 0 2 4 6 8 10 12 0 1 02 03 04 05 06 0 B a th life (h rs ) % composition N 1 -s in k N o S p ik e N 1 -s in k W ith S p ik e N 2 -S in k N o s p ik e N 2 -S in k w ith s p ik e

DOI: 10.1158/0008-5472.sabcs10-p6-05-03