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HomeSolid State PhenomenaSolid State Phenomena Vols. 108-109Defect Behaviour in Deuterated and Non-Deuterated...

Defect Behaviour in Deuterated and Non-Deuterated n-Type Si

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Gettering and Defect Engineering in Semiconductor Technology XI

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Periodical:

Solid State Phenomena (Volumes 108-109)

Pages:

553-560

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.108-109.553

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Online since:

December 2005

Authors:

Jan H. Bleka, Edouard V. Monakhov, Alexander G. Ulyashin, F. Danie Auret, Andrej Yu. Kuznetsov, B.S. Avset, Bengt Gunnar Svensson

Keywords:

Defect, Deuterium, DLTS, Hydrogen, Silicon

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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