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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Copper Surface Analysis with ToF-SIMS: Spectra...

Copper Surface Analysis with ToF-SIMS: Spectra Interpretation and Stability Issues

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

371-374

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.371

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Online since:

November 2007

Authors:

Chantal Trouiller, Sébastien Petitdidier, X. Ravanel, Lucile Broussous, M. Juhel, L.F.Tz. Kwakman, C. Wyon

Keywords:

Copper (Cu), Surface Contamination, ToF-SIMS

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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[1] A. Nishi, M. Sado, T. Miki and Y. Fukui: Appl. Surf. Sci. 203-204 (2003), pp.470-472.

[2] S. Petitdidier et al., SEMICON Korea 2005 Conference Proc., Contamination-Free Manufacturing Technology Seminar, Feb 2005, Seoul.

[3] F. Koetter, A. Benninghoven, Appl. Surf. 113 (1998) 47.