Copper Surface Analysis with ToF-SIMS: Spectra Interpretation and Stability Issues

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

371-374

DOI:

10.4028/www.scientific.net/SSP.134.371

Citation:

C. Trouiller et al., "Copper Surface Analysis with ToF-SIMS: Spectra Interpretation and Stability Issues", Solid State Phenomena, Vol. 134, pp. 371-374, 2008

Online since:

November 2007

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$38.00

[1] A. Nishi, M. Sado, T. Miki and Y. Fukui: Appl. Surf. Sci. 203-204 (2003), pp.470-472.

[2] S. Petitdidier et al., SEMICON Korea 2005 Conference Proc., Contamination-Free Manufacturing Technology Seminar, Feb 2005, Seoul.

[3] F. Koetter, A. Benninghoven, Appl. Surf. 113 (1998) 47.

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