Monitoring System for Airborne Molecular Contamination (AMC) in Semiconductor Manufacturing Areas and Micro-Environments

Abstract:

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As a result of shrinking dimensions and technology nodes, nanoelectronics manufacturing and handling processes demand growing requirements to the cleanliness of the air inside cleanrooms and microenvironments. Besides the limitation of particle contamination, the limitation of airborne molecular contamination (AMC) is necessary to ensure yield and quality of nanoelectronics production lines.

Info:

Periodical:

Solid State Phenomena (Volumes 145-146)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

135-138

DOI:

10.4028/www.scientific.net/SSP.145-146.135

Citation:

M. Otto et al., "Monitoring System for Airborne Molecular Contamination (AMC) in Semiconductor Manufacturing Areas and Micro-Environments", Solid State Phenomena, Vols. 145-146, pp. 135-138, 2009

Online since:

January 2009

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Price:

$35.00

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