Monitoring System for Airborne Molecular Contamination (AMC) in Semiconductor Manufacturing Areas and Micro-Environments
As a result of shrinking dimensions and technology nodes, nanoelectronics manufacturing and handling processes demand growing requirements to the cleanliness of the air inside cleanrooms and microenvironments. Besides the limitation of particle contamination, the limitation of airborne molecular contamination (AMC) is necessary to ensure yield and quality of nanoelectronics production lines.
Paul Mertens, Marc Meuris and Marc Heyns
M. Otto et al., "Monitoring System for Airborne Molecular Contamination (AMC) in Semiconductor Manufacturing Areas and Micro-Environments", Solid State Phenomena, Vols. 145-146, pp. 135-138, 2009