Proximity Gettering of Slow Diffuser Contaminants

Maria Luisa Polignano; Isabella Mica; Elena Cazzini; Monica Ceresoli; Davide Codegoni; Felice Russo; Giuseppe Moccia; Giancarlo Nardone; Roberto Alfonsetti; Giampaolo Polsinelli; Antonio Domenico D'Angelo; Antonio Patacchiola; Massimo Liverani; Pio Pianezza; Tiberio Lippa; Michele Carlini

doi:10.4028/www.scientific.net/SSP.205-206.271

Paper Titles

New Results on the Electrical Activity of 3d-Transition Metal Impurities in Silicon
p.245

Metastable CuVO* Complex in Silicon
p.255

Deep Energy Levels of Platinum-Hydrogen Complexes in Silicon
p.260

Association of FeB Pairs under Illumination
p.265

Proximity Gettering of Slow Diffuser Contaminants
p.271

Influence of Cu Concentration on the Getter Efficiency of Dislocations and Oxygen Precipitates in Silicon Wafers
p.278

Polycrystalline Silicon Gettering Layers with Controlled Residual Stress
p.284

Charge Carrier Transport along Grain Boundaries in Silicon
p.293

Impact of Electric Field on Thermoemission of Carriers from Shallow Dislocation-Related Electronic States
p.299

HomeSolid State PhenomenaSolid State Phenomena Vols. 205-206Proximity Gettering of Slow Diffuser Contaminants

Proximity Gettering of Slow Diffuser Contaminants

Abstract:

In this paper, we test proximity gettering layers obtained by carbon or silicon implantation for their efficiency in molybdenum and tungsten gettering. DLTS was used to measure the impurity concentration in the solid solution and so to evaluate gettering efficiency. It was found that carbon implantation is effective in capturing these impurities, whereas silicon implantation is not. Extended defects seem not to play an important role in gettering these impurities. In addition, gettering was found to be most effective at high impurity concentration.

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Periodical:

Solid State Phenomena (Volumes 205-206)

Pages:

271-277

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.205-206.271

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Online since:

October 2013

Authors:

Maria Luisa Polignano, Isabella Mica, Elena Cazzini, Monica Ceresoli, Davide Codegoni, Felice Russo, Giuseppe Moccia, Giancarlo Nardone, Roberto Alfonsetti, Giampaolo Polsinelli, Antonio Domenico D'Angelo, Antonio Patacchiola, Massimo Liverani, Pio Pianezza, Tiberio Lippa, Michele Carlini

Keywords:

Contamination, DLTS, Gettering, Molybdenum, Tungsten

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