Versatile Aqueous Chemistry for Selective Ru or WNx Etch and Implant BARC Removal in 5- and 3-nm Applications

Chien Pin Sherman Hsu; Polly Yi Ting Chen

doi:10.4028/www.scientific.net/SSP.282.288

Paper Titles

Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer
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Developing Integrated Solutions and Wet Cleans to Eliminate Tungsten Contact Attack in Sub 0x nm Nodes
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Post-CMP Cleaners for Tungsten Advanced Nodes: 10nm and 7nm
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Wet-Chemical Etching of Ruthenium in Acidic Ce⁴⁺ Solution
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Versatile Aqueous Chemistry for Selective Ru or WNx Etch and Implant BARC Removal in 5- and 3-nm Applications
p.288

Impact of Controlled Ni Contamination on Silicon Solar Wafer Material
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Wet Processing in State-of-the-Art Cu(In,Ga)(S,Se)₂ Thin Film Solar Cells
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Influence of VPT Treatment on Microscopic Distribution of Trace Metal Contaminants and its Effect on TXRF Measurement
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Advanced Data Analysis Strategies for Understanding Particle Contamination in Chemical Distribution Systems
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Versatile Aqueous Chemistry for Selective Ru or WNx Etch and Implant BARC Removal in 5- and 3-nm Applications

Abstract:

Ruthenium (Ru) is considered for use as a barrier-less metallization interconnect offering low effective resistivity in advanced sub-5nm semiconductor applications. A fully aqueous, environmentally friendly chemistry has been developed for effective Ru etching with broad substrate and metallization compatibilities. This alkaline oxidative chemistry is suitable for versatile etch/clean applications, including highly selective etch of SiGe, Si, Al, W, WNx and other W alloys. Its heavy hydrocarbon and residue removal capability are demonstrated as a Cu/TiN compatible, SPM alternative in multilayer PR/BARC stripping and implant BARC removal.

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Periodical:

Solid State Phenomena (Volume 282)

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288-292

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.282.288

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Online since:

August 2018

Authors:

Chien Pin Sherman Hsu, Polly Yi Ting Chen

Keywords:

Aqueous PR Strip, Cu Compatible SPM Alternative, Implant BARC Removal, Ru Etch, WNx Etch

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